Welcome to
Flow Meter Solutions

A flow meter is an instrument used to measure and record the flow, pressure and discharge of a fluid as a gaseous fuel. There are different types of flow meters and flow controllers with varied technology, including thermal mass flow, Coriolis mass flow and variable area flow meters.


A thermal mass flow (TMF) meter uses thermodynamic principles to drive actual mass flow. A thermal mass flow sensor can be combined with an integral valve and PID flow controller in one instrument. This will accurately control the flow of gases and liquids over a wide range of flow rates. A pressure sensor can be mounted in place of a flow sensor for pressure control applications.

Thermal mass flow meters and mass flow controllers have high repeatability and accuracy for a reliable and stable process. Learn more about Brooks Instrument Thermal Mass Flow Meter technology.

Various types of thermal mass flow meters and controllers include:

• Digital, Metal-Sealed, Thermal Gas flow meter and controller
• Digital, Elastomer-Sealed Thermal Gas flow meter and controller
• Analog, Thermal Gas flow meter and controller
• Analog, Thermal Liquid flow meter and controller
• NEMA 4X/IP66 Thermal Mass Flow meter and controller

The Coriolis principle is a proven technology that has been used in process flow measurement in a wide variety of markets and applications for more than 15 years. Coriolis flow meters are traditionally used for high flow processes. New technologies are making it more and more possible to use Coriolis mass flow meters and mass flow controllers for precise measurement and control in low flow applications.

Stand-alone devices can simultaneously measure mass flow, fluid density and temperature. There are various types of Coriolis mass flow meters and flow controllers, including the Brooks Instrument line of Quantim™ Coriolis flow meters/controllers and Quantim™ Coriolis sensors/transmitters.

Learn more about Brooks Instrument Coriolis Mass Flow Meter technology.


A Variable Area (VA) flow meter, also called a rotameter, is a cost-effective solution for mass flow indication of liquids and gases. Because external power is not required for operation, variable area flow meters provide fail-safe flow rates for many varied applications.

Variable area meters can be used in a range of applications. They can be equipped with variety of wetted materials for high pressure, high temperature and hazardous conditions.

Learn more about Brooks Instrument Variable Area Flow Meter technology.

Various types of variable area flow meters and controllers include:

• Armored metal tube rotameter
• High flow, glass tube variable area meter
• Low flow, glass tube variable area meter
• Plastic tube variable area meter

Flow measurement and flow control solutions can be used in many industries, including:

• Biopharmaceuticals
• Oil and gas
• Fuel Cell research
• Chemicals
• Medical devices
• Analytical instrumentation
• Semiconductor manufacturing
• and more!

Find your application below or learn about more applications.

Application	Technology	Brooks Product	Solution
Vacuum Processes	Pressure control; Coriolis mass flow	Quantim or GF Series	For vacuum processes, these permit excellent alignment between application requirements and MFC performance. Read more.
Bioreactors	Variable area	Sho-Rate	For bioreactors, these are ideal for small systems with manual gas adjustment. There are also solutions for automatic control. Read more.
Precision Coatings	Coriolis mass flow	Quantim or SLA series	For precision coatings, these control the liquid flow rate to the spray nozzle and detect the presence of gas bubbles in the liquid stream. Read more.
Chemical Injection/Dosing Systems	Coriolis mass flow; Variable area	Metal Tube (MT) or Quantim	For chemical injection/dosing systems, these offer flow rates and materials of construction, as well as extremely accurate addition measurements to solve many challenges. Read more.
Process Analyzer Sample Flow	Variable area	Metal Tube (MT)	For rotating equipment, these continuously monitor lube oil and coolant flows and ensure superior flow accuracy to dry glass seals. Read more.
Rotating Equipment	Variable area; Thermal mass flow	Metal Tube (MT) or SLAMf series	For rotating equipment, these continuously monitor lube oil and coolant flows and ensure superior flow accuracy to dry glass seals. Read more.
Fuel Cell Test Stand	Coriolis mass flow	GF Series or Quantim	For fuel cell test stand, these provide accurate, fast responding, stable mass flow control with wide turndown. Read more.
Device Testing and Metrology	Variable area; Coriolis mass flow; Thermal mass flow	Quantim or SLA series	For device testing and metrology, these provide quick and reliable tests by applying pressure or vacuum to the device under test and confirming the absence of flow. Read more.